Co-creating next-generation quantum and supercomputing technology since 2013
Process integration for high performance devices in a production fab
- SC wiring
- Josephson Junctions (JJ)
- Stacked vias
- 10+ metal layers
- Superconducting interposers
Technology as a Service: A service model designed to accelerate big ideas
SkyWater is a global leader in the semiconductor implementation of superconducting technologies. Given the non-linear, highly iterative nature of technology development in this space, finding a development partner who happily experiments in a controlled production environment is critical to success.
Read More About TaaSAdvanced process development and volume production
Process Integration Capabilities
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| Activity | Tool |
|---|---|
| Nb wiring deposition | Endura |
| Resistor deposition (W) | Endura |
| JJ formation (Nb dep, pure Al dep, oxidation, Nb dep, all in-situ) | Endura |
| SiN low-temp deposition | Endura |
| Nb & W-resistor metal etch | LAM 9600 |
| Oxide etch, stop on Nb | AMAT MXP |
| Nb damascene CMP | Westech 472 |
| Oxide CMP | Westech 472 |
| TEOS low-temp deposition | Novellus C2 Sequel |
| HDP SiH4 oxide low-temp deposition | Novellus Speed |
| Post metal etch solvent cleans | Semitool |
| Resist ash | Gasonics A3000 |
| Resist ash & polymer removal | Iridia |
| Lithography down to 55 nm with field stitching up to 6″x6″ | ASML |
U.S. Department of Defense Awards SkyWater up to $99M in Additional Funding to Advance Rad-Hard Technology to Productization and Qualification
