Co-creating next-generation quantum and supercomputing technology since 2013
Process integration for high performance devices in a production fab
- SC wiring
- Josephson Junctions (JJ)
- Stacked vias
- 10+ metal layers
- Superconducting interposers
Technology as a Service: A service model designed to accelerate big ideas
SkyWater is a global leader in the semiconductor implementation of superconducting technologies. Given the non-linear, highly iterative nature of technology development in this space, finding a development partner who happily experiments in a controlled production environment is critical to success.
Innovation Starts with TaaS
Enabling Scalable Quantum Computing and Sensing
SkyWater’s superconducting capabilities are foundational for next-generation quantum technologies. We support the development and manufacturing of superconducting qubits, quantum processors, and cryogenic control electronics with advanced materials and scalable processes. Our TaaS model accelerates innovation in quantum computing by providing domestic, Trusted foundry services tailored to the unique needs of quantum device developers—helping bridge the gap from research to scalable production.
SkyWater Enables QuantumAdvanced process development and volume production
Process Integration Capabilities
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| Activity | Tool |
|---|---|
| Nb wiring deposition | Endura |
| Resistor deposition (W) | Endura |
| JJ formation (Nb dep, pure Al dep, oxidation, Nb dep, all in-situ) | Endura |
| SiN low-temp deposition | Endura |
| Nb & W-resistor metal etch | LAM 9600 |
| Oxide etch, stop on Nb | AMAT MXP |
| Nb damascene CMP | Westech 472 |
| Oxide CMP | Westech 472 |
| TEOS low-temp deposition | Novellus C2 Sequel |
| HDP SiH4 oxide low-temp deposition | Novellus Speed |
| Post metal etch solvent cleans | Semitool |
| Resist ash | Gasonics A3000 |
| Resist ash & polymer removal | Iridia |
| Lithography down to 55 nm with field stitching up to 6″x6″ | ASML |
